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Function of liquid and tool wear in ultrasonic bound-abrasive polishing of fused silica with different polishing tools
Zhou, Chenghu1; Zhang, Qiuhui1; He, Changtao2; Li, Yaguo3
2014
Source PublicationOPTIK
Volume125Issue:15Pages:4064-4068
Contribution Rank2
AbstractThe recently proposed fixed-abrasive polishing process was revisited, but this paper focuses mainly on the potential influence of various liquids and the different kinds of pellets on the polishing process as well as the wear of pellet in ultrasonic assisted and conventional processes. The results show that using liquids is helpful in improving surface quality and lowering surface roughness. In particular, the surface roughness is improved sharply for pore-free pellet, from >80 nm to <1 nm (avg.) and the polishing process smoothly proceed that otherwise will hardly progress without liquids. However, the liquids do not necessarily always improve polishing process. There is an optimal volume for a specific polishing process. Moreover, the wear of pellet was also evaluated as well. The results suggest that applying ultrasonics can effectively alleviate the wear loss of pellet and increase the "G-ratio" of polishing process. (C) 2014 Elsevier GmbH. All rights reserved.
KeywordFixed-abrasive Polishing Ultrasonic Vibration Polishing Wear Of Polishing Tool Fused Silica Glass Polishing Fluids
SubtypeArticle
DOI10.1016/j.ijleo.2014.01.113
WOS HeadingsScience & Technology ; Physical Sciences
Indexed BySCI
Language英语
WOS KeywordEVALUATING SUBSURFACE DAMAGE ; GLASS ; VIBRATION ; PELLETS
WOS Research AreaOptics
WOS SubjectOptics
WOS IDWOS:000339646000056
Citation statistics
Cited Times:22[WOS]   [WOS Record]     [Related Records in WOS]
Document Type期刊论文
Identifierhttp://ir.xao.ac.cn/handle/45760611-7/599
Collection计算机技术应用研究室
Affiliation1.Henan Inst Engn, Sch Elect Informat & Engn, Zhengzhou 451191, Peoples R China
2.Chinese Acad Sci, Xinjiang Astron Observ, Urumqi 830011, Peoples R China
3.Fine Opt Engn Res Ctr, Chengdu 610041, Peoples R China
Recommended Citation
GB/T 7714
Zhou, Chenghu,Zhang, Qiuhui,He, Changtao,et al. Function of liquid and tool wear in ultrasonic bound-abrasive polishing of fused silica with different polishing tools[J]. OPTIK,2014,125(15):4064-4068.
APA Zhou, Chenghu,Zhang, Qiuhui,He, Changtao,&Li, Yaguo.(2014).Function of liquid and tool wear in ultrasonic bound-abrasive polishing of fused silica with different polishing tools.OPTIK,125(15),4064-4068.
MLA Zhou, Chenghu,et al."Function of liquid and tool wear in ultrasonic bound-abrasive polishing of fused silica with different polishing tools".OPTIK 125.15(2014):4064-4068.
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