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Function of liquid and tool wear in ultrasonic bound-abrasive polishing of fused silica with different polishing tools | |
Zhou, Chenghu1; Zhang, Qiuhui1; He, Changtao2![]() | |
2014 | |
Source Publication | OPTIK
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Volume | 125Issue:15Pages:4064-4068 |
Contribution Rank | 2 |
Abstract | The recently proposed fixed-abrasive polishing process was revisited, but this paper focuses mainly on the potential influence of various liquids and the different kinds of pellets on the polishing process as well as the wear of pellet in ultrasonic assisted and conventional processes. The results show that using liquids is helpful in improving surface quality and lowering surface roughness. In particular, the surface roughness is improved sharply for pore-free pellet, from >80 nm to <1 nm (avg.) and the polishing process smoothly proceed that otherwise will hardly progress without liquids. However, the liquids do not necessarily always improve polishing process. There is an optimal volume for a specific polishing process. Moreover, the wear of pellet was also evaluated as well. The results suggest that applying ultrasonics can effectively alleviate the wear loss of pellet and increase the "G-ratio" of polishing process. (C) 2014 Elsevier GmbH. All rights reserved. |
Keyword | Fixed-abrasive Polishing Ultrasonic Vibration Polishing Wear Of Polishing Tool Fused Silica Glass Polishing Fluids |
Subtype | Article |
DOI | 10.1016/j.ijleo.2014.01.113 |
WOS Headings | Science & Technology ; Physical Sciences |
Indexed By | SCI |
Language | 英语 |
WOS Keyword | EVALUATING SUBSURFACE DAMAGE ; GLASS ; VIBRATION ; PELLETS |
WOS Research Area | Optics |
WOS Subject | Optics |
WOS ID | WOS:000339646000056 |
Citation statistics | |
Document Type | 期刊论文 |
Identifier | http://ir.xao.ac.cn/handle/45760611-7/599 |
Collection | 计算机技术应用研究室 |
Affiliation | 1.Henan Inst Engn, Sch Elect Informat & Engn, Zhengzhou 451191, Peoples R China 2.Chinese Acad Sci, Xinjiang Astron Observ, Urumqi 830011, Peoples R China 3.Fine Opt Engn Res Ctr, Chengdu 610041, Peoples R China |
Recommended Citation GB/T 7714 | Zhou, Chenghu,Zhang, Qiuhui,He, Changtao,et al. Function of liquid and tool wear in ultrasonic bound-abrasive polishing of fused silica with different polishing tools[J]. OPTIK,2014,125(15):4064-4068. |
APA | Zhou, Chenghu,Zhang, Qiuhui,He, Changtao,&Li, Yaguo.(2014).Function of liquid and tool wear in ultrasonic bound-abrasive polishing of fused silica with different polishing tools.OPTIK,125(15),4064-4068. |
MLA | Zhou, Chenghu,et al."Function of liquid and tool wear in ultrasonic bound-abrasive polishing of fused silica with different polishing tools".OPTIK 125.15(2014):4064-4068. |
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Function of liquid a(1894KB) | 期刊论文 | 出版稿 | 开放获取 | CC BY-NC-ND | View Application Full Text |
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