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孙伟超 [1]
林星魁 [1]
艾力·伊沙木丁 [1]
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光学望远镜镜片旋转镀膜修正挡板的仿真设计
期刊论文
表面技术, 2022, 卷号: 51, 期号: 4, 页码: 342-347
Authors:
孙伟超
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许竞
;
林星魁
;
艾力·伊沙木丁
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Submit date：2023/05/10
真空镀膜
蒸发源
光学薄膜
膜厚均匀性
修正挡板
数值分析
